Ultra trace analysis technology

Technologies that measure chemicals and microorganisms that exist in infinitesimal quantities in the environment

Background and Outline

In inhabited room environments such as office buildings and homes, sick building and sick house syndromes are becoming a social problem due to their contaminated air caused by interior air pollution. In semiconductor and liquid crystal factories, in addition to particle control as in the past, it is now important to control molecular pollutants in the air. In pharmaceutical and food factories as well as in hospitals, it has long been vital to control molds and other micro-organisms. To resolve such challenges and to provide interior environments that meet these needs, we develop analytical technologies for trace chemicals in the environment.


Gas chromatograph /Mass spectrometers (GC/MS)


These instruments analyze toluene and other VOC that are substances causing interior air contamination, as well as phthalates and other organic substances that are controlled in semiconductor factories. They collect adsorbents and analyze them by thermal desorption, or collect them in containers called canisters. The quantification limit is 50ng/m3. Shinryo has three GC/MS for sick house countermeasure use, semiconductor and liquid crystal factory use, and odor countermeasure use.

Wafer thermal desorption device

This device heats organic substances adsorbed to silicon wafer and glass substrate to detach them from these surfaces. The detached organic material is analyzed by the GC/MS. The quantification limit is 0.001ng/cm2.

High performance liquid chromatograph (HPLC)


This analyzes formaldehyde, which is considered to be a substance that causes interior air contamination. The quantification limit is 0.8μ g/m3.

Ion chromatograph (IC)


This device measures ion constituents of solutions. In semiconductor or liquid crystal factories, it is used to measure ammonia or other soluble substances in the air. It inserts an absorbent such as ultrapure water into an impinger, into which air is bubbled, and the air is collected. Then the absorbent is analyzed. Because atmospheric ions impact measurement values, an ion chromatograph is installed in a clean room equipped with a chemical filter. The quantification limit is 10ng/m3.

Inductively coupled plasma/ mass spectrometer (ICP/MS)


This device measures metal constituents of solutions, and is used to measure metal constituents of the air in semiconductor or liquid crystal factories. It performs measurements by bubbling air into an impinger, and the adsorbent is analyzed in the same way as in an ion chromatograph. It is installed inside clean rooms just like ion chromatographs because metal contaminants in the atmosphere impact measurement values. The quantification limit is 1ng/m3.